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MEMS Vibratory Gyroscopes [electronic resource] : Structural Approaches to Improve Robustness / by Cenk Acar, Andrei Shkel.
by Acar, Cenk | Shkel, Andrei | SpringerLink (Online service). Source: Springer eBooksMaterial type:  Book; Format:
electronic
available online
 ; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2009Online access: Click here to access online Availability: No items available
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2.
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RF MEMS Switches and Integrated Switching Circuits [electronic resource] / by Ai-Qun Liu.
by Liu, Ai-Qun | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2010Online access: Click here to access online Availability: No items available
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3.
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BioNanoFluidic MEMS [electronic resource] / edited by Peter J. Hesketh.
by Hesketh, Peter J | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2008Online access: Click here to access online Availability: No items available
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4.
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MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin.
by Ghodssi, Reza | Lin, Pinyen | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2011Online access: Click here to access online Availability: No items available
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5.
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Photonic Microsystems [electronic resource] : Micro and Nanotechnology Applied to Optical Devices and Systems / by Olav Solgaard.
by Solgaard, Olav | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2009Online access: Click here to access online Availability: No items available
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6.
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Multi-Wafer Rotating MEMS Machines [electronic resource] : Turbines, Generators, and Engines / edited by Jeffrey Lang.
by Lang, Jeffrey | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2010Online access: Click here to access online Availability: No items available
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7.
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MEMS Reliability [electronic resource] / by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.
by Hartzell, Allyson L | da Silva, Mark G | Shea, Herbert R | SpringerLink (Online service). Edition: 1.Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US, 2011Online access: Click here to access online Availability: No items available
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8.
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Radioisotope Thin-Film Powered Microsystems [electronic resource] / by Rajesh Duggirala, Amit Lal, Shankar Radhakrishnan.
by Duggirala, Rajesh | Lal, Amit | Radhakrishnan, Shankar | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: New York, NY : Springer New York, 2010Online access: Click here to access online Availability: No items available
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9.
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Silicon Carbide Microsystems for Harsh Environments [electronic resource] / by Muthu B.J. Wijesundara, Robert Azevedo.
by Wijesundara, Muthu B.J | Azevedo, Robert | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: New York, NY : Springer New York, 2011Online access: Click here to access online Availability: No items available
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10.
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MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin.
by Ghodssi, Reza [editor.] | Lin, Pinyen [editor.] | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2011Other title: The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied.Online access: Click here to access online Availability: No items available
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11.
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MEMS Reliability [electronic resource] / by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.
by Hartzell, Allyson L [author.] | da Silva, Mark G [author.] | Shea, Herbert R [author.] | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2011Online access: Click here to access online Availability: No items available
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12.
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Silicon Carbide Microsystems for Harsh Environments [electronic resource] / by Muthu B.J. Wijesundara, Robert Azevedo.
by Wijesundara, Muthu B.J [author.] | Azevedo, Robert [author.] | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: New York, NY : Springer New York, 2011Online access: Click here to access online Availability: No items available
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13.
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RF MEMS Switches and Integrated Switching Circuits [electronic resource] : Design, Fabrication, and Test / by Ai-Qun Liu.
by Liu, Ai-Qun [author.] | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2010Online access: Click here to access online Availability: No items available
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14.
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Multi-Wafer Rotating MEMS Machines [electronic resource] : Turbines, Generators, and Engines / edited by Jeffrey Lang.
by Lang, Jeffrey [editor.] | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: Boston, MA : Springer US : Imprint: Springer, 2010Online access: Click here to access online Availability: No items available
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15.
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Radioisotope Thin-Film Powered Microsystems [electronic resource] / by Rajesh Duggirala, Amit Lal, Shankar Radhakrishnan.
by Duggirala, Rajesh [author.] | Lal, Amit [author.] | Radhakrishnan, Shankar [author.] | SpringerLink (Online service). Source: Springer eBooksMaterial type: Book; Format:
electronic
available online
; Literary form:
Not fiction
Publisher: New York, NY : Springer New York, 2010Online access: Click here to access online Availability: No items available
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