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MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin.

By: Ghodssi, Reza.
Contributor(s): Lin, Pinyen | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: MEMS Reference Shelf.Publisher: Boston, MA : Springer US, 2011Description: digital.ISBN: 9780387473185.Subject(s): Engineering | Electronics | Systems engineering | Materials | Surfaces (Physics) | Engineering | Electronics and Microelectronics, Instrumentation | Materials Science, general | Circuits and Systems | Surfaces and Interfaces, Thin FilmsDDC classification: 621.381 Online resources: Click here to access online In: Springer eBooks
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