Radioactivity and Radioisotopes -- Radioisotope Thin Films for Microsystems -- Radioisotope Micropower Generation: Microfabricated Reciprocating Electro-Mechanical Power Generators -- Radioisotope Micropower Generation: Integrated Radioisotope Actuated Electro-Mechanical Power Generators -- Radioisotope Micropower Generation: 3D Silicon Electronvoltaics -- Radioisotope Direct Charging: Autonomous Wireless Sensors -- Radioisotope Decay Rate Based Counting Clock.

“Radioisotope Thin-Film Powered Microsystems” describes the use of radioisotopes in enabling compact long lifetime wireless sensor Microsystems for applications including environmental, medical and industrial monitoring. The book introduces several novel devices that exploit the many unique properties of radioactivity to enable the utilization of low quantities of relatively safe radioisotopes in realizing the various components required in microsystems. The book presents:-Radioisotope thin film actuated reciprocating microelectromechanical power generators that utilize low quantities of high energy density of radioisotope fuels to realize safe and compact long lifetime microbatteries,-3D silicon electronvoltaics and concepts for 3D betavoltaics that maximize the packing density of high energy density radioisotope fuel to realize very high energy density microbatteries,-Long lifetime autonomous wireless sensors based on modulated RF generation from discharge of radioisotope direct charge actuated reciprocating cantilevers, and-Ultra low-power beta radiation counting clocks and true random number generators based on the near constant probability of decay of radioactive nuclei, while providing information on how to safely apply radioisotope thin-films across numerous devices to create long lifetime sensors.This volume will be valuable for engineers and researchers working in Microsystems.