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Wafer Level 3-D ICs Process Technology [electronic resource] / edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif.

By: Tan, Chuan Seng.
Contributor(s): Gutmann, Ronald J | Reif, L. Rafael | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Integrated Circuits and Systems.Publisher: Boston, MA : Springer US, 2008Description: digital.ISBN: 9780387765341.Subject(s): Engineering | Electronics | Optical materials | Surfaces (Physics) | Engineering | Electronics and Microelectronics, Instrumentation | Optical and Electronic Materials | Surfaces and Interfaces, Thin Films | Engineering, generalOnline resources: Click here to access online In: Springer eBooks
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