Wafer Level 3-D ICs Process Technology (Record no. 68067)

000 -LEADER
fixed length control field 01372nam a22003975i 4500
001 - CONTROL NUMBER
control field 978-0-387-76534-1
003 - CONTROL NUMBER IDENTIFIER
control field DE-He213
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20130515020601.0
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr nn 008mamaa
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100301s2008 xxu| s |||| 0|eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780387765341
-- 978-0-387-76534-1
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1007/978-0-387-76534-1
Source of number or code doi
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Tan, Chuan Seng.
245 10 - TITLE STATEMENT
Title Wafer Level 3-D ICs Process Technology
Medium [electronic resource] /
Statement of responsibility, etc edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Boston, MA :
Name of publisher, distributor, etc Springer US,
Date of publication, distribution, etc 2008.
300 ## - PHYSICAL DESCRIPTION
Other physical details digital.
490 0# - SERIES STATEMENT
Series statement Integrated Circuits and Systems,
International Standard Serial Number 1558-9412
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Engineering.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Electronics.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Optical materials.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Surfaces (Physics).
650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Engineering.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Electronics and Microelectronics, Instrumentation.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Optical and Electronic Materials.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Surfaces and Interfaces, Thin Films.
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Engineering, general.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Gutmann, Ronald J.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Reif, L. Rafael.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element SpringerLink (Online service)
773 0# - HOST ITEM ENTRY
Title Springer eBooks
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Display text Printed edition:
International Standard Book Number 9780387765327
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
Uniform title Integrated Circuits and Systems,
-- 1558-9412
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://dx.doi.org/10.1007/978-0-387-76534-1
912 ## -
-- ZDB-2-ENG

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