Tan, Chuan Seng.

Wafer Level 3-D ICs Process Technology [electronic resource] / edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif. - Boston, MA : Springer US, 2008. - digital. - Integrated Circuits and Systems, 1558-9412 . - Integrated Circuits and Systems, .

9780387765341

10.1007/978-0-387-76534-1 doi


Engineering.
Electronics.
Optical materials.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Optical and Electronic Materials.
Surfaces and Interfaces, Thin Films.
Engineering, general.

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