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1. Introductory MEMS [electronic resource] : Fabrication and Applications / by Thomas M. Adams, Richard A. Layton.

by Adams, Thomas M | Layton, Richard A | SpringerLink (Online service).

Edition: 1.Source: Springer eBooksMaterial type: book Book; Format: electronic available online remote; Literary form: Not fiction Publisher: Boston, MA : Springer US, 2010Online access: Click here to access online Availability: No items available
2. Introductory MEMS [electronic resource] : Fabrication and Applications / by Thomas M. Adams, Richard A. Layton.

by Adams, Thomas M [author.] | Layton, Richard A [author.] | SpringerLink (Online service).

Edition: 1.Source: Springer eBooksMaterial type: book Book; Format: electronic available online remote; Literary form: Not fiction Publisher: Boston, MA : Springer US, 2010Online access: Click here to access online Availability: No items available

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