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Introductory MEMS [electronic resource] : Fabrication and Applications / by Thomas M. Adams, Richard A. Layton.

By: Adams, Thomas M.
Contributor(s): Layton, Richard A | SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Boston, MA : Springer US, 2010Edition: 1.Description: digital.ISBN: 9780387095110.Subject(s): Engineering | Mechanics | Materials | Electronics | Systems engineering | Surfaces (Physics) | Engineering | Electronics and Microelectronics, Instrumentation | Circuits and Systems | Mechanics | Surfaces and Interfaces, Thin Films | Continuum Mechanics and Mechanics of MaterialsDDC classification: 621.381 Online resources: Click here to access online In: Springer eBooks
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