Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.
By: Büttgenbach, Stephanus.
Contributor(s): Burisch, Arne | Hesselbach, Jürgen | SpringerLink (Online service).
Material type:![materialTypeLabel](/opac-tmpl/lib/famfamfam/BK.png)
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