Büttgenbach, Stephanus.
Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2011. - digital. - Microtechnology and MEMS, 1615-8326 . - Microtechnology and MEMS, .
9783642129032
10.1007/978-3-642-12903-2 doi
Engineering.
Structural control (Engineering).
Nanotechnology.
Engineering.
Nanotechnology and Microengineering.
Mechatronics.
Operating Procedures, Materials Treatment.
Nanotechnology.
T174.7
620.5
Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2011. - digital. - Microtechnology and MEMS, 1615-8326 . - Microtechnology and MEMS, .
9783642129032
10.1007/978-3-642-12903-2 doi
Engineering.
Structural control (Engineering).
Nanotechnology.
Engineering.
Nanotechnology and Microengineering.
Mechatronics.
Operating Procedures, Materials Treatment.
Nanotechnology.
T174.7
620.5