Low Pressure Plasmas and Microstructuring Technology [electronic resource] / by Gerhard Franz.
By: Franz, Gerhard.
Contributor(s): SpringerLink (Online service).
Material type:
BookPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2009Description: digital.ISBN: 9783540858492.Subject(s): Materials | Molecular structure | Electronics | Optical materials | Surfaces (Physics) | Material Science | Optical and Electronic Materials | Electronics and Microelectronics, Instrumentation | Surfaces and Interfaces, Thin Films | Atomic and Molecular Structure and SpectraOnline resources: Click here to access online
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