Franz, Gerhard.
Low Pressure Plasmas and Microstructuring Technology [electronic resource] / by Gerhard Franz. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2009. - digital.
9783540858492
10.1007/978-3-540-85849-2 doi
Materials.
Molecular structure.
Electronics.
Optical materials.
Surfaces (Physics).
Material Science.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Atomic and Molecular Structure and Spectra.
Low Pressure Plasmas and Microstructuring Technology [electronic resource] / by Gerhard Franz. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2009. - digital.
9783540858492
10.1007/978-3-540-85849-2 doi
Materials.
Molecular structure.
Electronics.
Optical materials.
Surfaces (Physics).
Material Science.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Atomic and Molecular Structure and Spectra.