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Silicon Devices and Process Integration [electronic resource] : Deep Submicron and Nano-Scale Technologies / by Badih El-Kareh.

By: El-Kareh, Badih.
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Boston, MA : Springer US, 2009Description: digital.ISBN: 9780387690100.Subject(s): Engineering | Computer engineering | Electronics | Systems engineering | Materials | Engineering | Circuits and Systems | Electronics and Microelectronics, Instrumentation | Electrical Engineering | Materials Science, generalDDC classification: 621.3815 Online resources: Click here to access online In: Springer eBooks
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