El-Kareh, Badih.
Silicon Devices and Process Integration Deep Submicron and Nano-Scale Technologies / [electronic resource] : by Badih El-Kareh. - Boston, MA : Springer US, 2009. - digital.
9780387690100
10.1007/978-0-387-69010-0 doi
Engineering.
Computer engineering.
Electronics.
Systems engineering.
Materials.
Engineering.
Circuits and Systems.
Electronics and Microelectronics, Instrumentation.
Electrical Engineering.
Materials Science, general.
TK7888.4
621.3815
Silicon Devices and Process Integration Deep Submicron and Nano-Scale Technologies / [electronic resource] : by Badih El-Kareh. - Boston, MA : Springer US, 2009. - digital.
9780387690100
10.1007/978-0-387-69010-0 doi
Engineering.
Computer engineering.
Electronics.
Systems engineering.
Materials.
Engineering.
Circuits and Systems.
Electronics and Microelectronics, Instrumentation.
Electrical Engineering.
Materials Science, general.
TK7888.4
621.3815