000			02804nam a22005175i 4500
001			978-1-4614-9176-7
003			DE-He213
005			20140220082504.0
007			cr nn 008mamaa
008			131120s2014 xxu| s |||| 0|eng d
020			_a9781461491767 _9978-1-4614-9176-7
024	7		_a10.1007/978-1-4614-9176-7 _2doi
050		4	_aQD551-578
072		7	_aPNRH _2bicssc
072		7	_aSCI013050 _2bisacsh
082	0	4	_a541.37 _223
100	1		_aKondo, Kazuo. _eeditor.
245	1	0	_aCopper Electrodeposition for Nanofabrication of Electronics Devices _h[electronic resource] / _cedited by Kazuo Kondo, Rohan N. Akolkar, Dale P. Barkey, Masayuki Yokoi.
264		1	_aNew York, NY : _bSpringer New York : _bImprint: Springer, _c2014.
300			_aVIII, 282 p. 190 illus., 75 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aNanostructure Science and Technology, _x1571-5744
505	0		_aCopper Electrodeposition -- Suppression Effect and Additive Chemistry -- Acceleration Effect -- Modeling and Simulation -- Frontiers of Cu Electrodeposition and Electroless Plating for On-Chip Interconnects -- Microstructure of Evolution of Copper in Nano-scale Interconnect Features -- Direct Copper Plating -- Through Silicon Via -- Build-up Printed Wiring Boards -- Copper Foil Smooth on Both Sides for Lithium Ion Battery -- Through Hole Plating.
520			_aThis book discusses the scientific mechanism of copper electrodeposition and it's wide range of applications. The book will cover everything from the basic fundamentals to practical applications. In addition, the book will also cover important topics such as: • ULSI wiring material based upon copper nanowiring • Printed circuit boards • Stacked semiconductors • Through Silicon Via • Smooth copper foil for Lithium-Ion battery electrodes This book is ideal for nanotechnologists, industry professionals, and practitioners.
650		0	_aChemistry.
650		0	_aElectronics.
650		0	_aNanotechnology.
650	1	4	_aChemistry.
650	2	4	_aElectrochemistry.
650	2	4	_aNanotechnology.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aSolid State Physics.
700	1		_aAkolkar, Rohan N. _eeditor.
700	1		_aBarkey, Dale P. _eeditor.
700	1		_aYokoi, Masayuki. _eeditor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9781461491750
830		0	_aNanostructure Science and Technology, _x1571-5744
856	4	0	_uhttp://dx.doi.org/10.1007/978-1-4614-9176-7
912			_aZDB-2-CMS
999			_c92330 _d92330