| 000 | 01330nam a22004095i 4500 | ||
|---|---|---|---|
| 001 | 978-3-642-19489-4 | ||
| 003 | DE-He213 | ||
| 005 | 20130515022151.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110530s2011 gw | s |||| 0|eng d | ||
| 020 |
_a9783642194894 _9978-3-642-19489-4 |
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| 024 | 7 |
_a10.1007/978-3-642-19489-4 _2doi |
|
| 050 | 4 | _aT174.7 | |
| 072 | 7 |
_aTDPB _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 082 | 0 | 4 |
_a620.5 _223 |
| 100 | 1 | _aSchomburg, Werner Karl. | |
| 245 | 1 | 0 |
_aIntroduction to Microsystem Design _h[electronic resource] / _cby Werner Karl Schomburg. |
| 260 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011. |
||
| 300 | _bdigital. | ||
| 490 | 0 |
_aRWTHedition, _x1865-0899 ; _v1 |
|
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aSystems engineering. | |
| 650 | 0 | _aOptical materials. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 650 | 2 | 4 | _aOptical and Electronic Materials. |
| 650 | 2 | 4 | _aApplied and Technical Physics. |
| 650 | 2 | 4 | _aCircuits and Systems. |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783642194887 |
| 830 | 0 |
_aRWTHedition, _x1865-0899 ; _v1 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-3-642-19489-4 |
| 912 | _aZDB-2-ENG | ||
| 999 |
_c84788 _d84788 |
||