| 000 | 01354nam a22003735i 4500 | ||
|---|---|---|---|
| 001 | 978-3-642-14447-9 | ||
| 003 | DE-He213 | ||
| 005 | 20130515022055.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 101029s2010 gw | s |||| 0|eng d | ||
| 020 |
_a9783642144479 _9978-3-642-14447-9 |
||
| 024 | 7 |
_a10.1007/978-3-642-14447-9 _2doi |
|
| 050 | 4 | _aTA1750-1750.22 | |
| 072 | 7 |
_aTJFD _2bicssc |
|
| 072 | 7 |
_aTEC021000 _2bisacsh |
|
| 082 | 0 | 4 |
_a620.11295 _223 |
| 082 | 0 | 4 |
_a620.11297 _223 |
| 100 | 1 | _aRebohle, Lars. | |
| 245 | 1 | 0 |
_aRare-Earth Implanted MOS Devices for Silicon Photonics _h[electronic resource] : _bMicrostructural, Electrical and Optoelectronic Properties / _cby Lars Rebohle, Wolfgang Skorupa. |
| 260 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2010. |
||
| 300 | _bdigital. | ||
| 490 | 0 |
_aSpringer Series in Materials Science, _x0933-033X ; _v142 |
|
| 650 | 0 | _aOptical materials. | |
| 650 | 1 | 4 | _aMaterials Science. |
| 650 | 2 | 4 | _aOptical and Electronic Materials. |
| 700 | 1 | _aSkorupa, Wolfgang. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783642144462 |
| 830 | 0 |
_aSpringer Series in Materials Science, _x0933-033X ; _v142 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-3-642-14447-9 |
| 912 | _aZDB-2-PHA | ||
| 999 |
_c83732 _d83732 |
||