000			01714nam a22004815i 4500
001			978-3-642-10806-8
003			DE-He213
005			20130515021958.0
007			cr nn 008mamaa
008			101013s2011 gw | s |||| 0|eng d
020			_a9783642108068 _9978-3-642-10806-8
024	7		_a10.1007/978-3-642-10806-8 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aLenk, Arno.
245	1	0	_aElectromechanical Systems in Microtechnology and Mechatronics _h[electronic resource] : _bElectrical, Mechanical and Acoustic Networks, their Interactions and Applications / _cby Arno Lenk, Rüdiger G. Ballas, Roland Werthschützky, Günther Pfeifer.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011.
300			_bdigital.
490	0		_aMicrotechnology and MEMS, _x1615-8326
650		0	_aEngineering.
650		0	_aAcoustics.
650		0	_aVibration.
650		0	_aMechanical engineering.
650		0	_aElectronics.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aMechanical Engineering.
650	2	4	_aVibration, Dynamical Systems, Control.
650	2	4	_aAcoustics.
700	1		_aBallas, Rüdiger G.
700	1		_aWerthschützky, Roland.
700	1		_aPfeifer, Günther.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783642108051
830		0	_aMicrotechnology and MEMS, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-642-10806-8
912			_aZDB-2-CMS
999			_c82845 _d82845