000			01259nam a22003615i 4500
001			978-3-540-85849-2
003			DE-He213
005			20130515021806.0
007			cr nn 008mamaa
008			100301s2009 gw | s |||| 0|eng d
020			_a9783540858492 _9978-3-540-85849-2
024	7		_a10.1007/978-3-540-85849-2 _2doi
100	1		_aFranz, Gerhard.
245	1	0	_aLow Pressure Plasmas and Microstructuring Technology _h[electronic resource] / _cby Gerhard Franz.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2009.
300			_bdigital.
650		0	_aMaterials.
650		0	_aMolecular structure.
650		0	_aElectronics.
650		0	_aOptical materials.
650		0	_aSurfaces (Physics).
650	1	4	_aMaterial Science.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aAtomic and Molecular Structure and Spectra.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540858485
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-85849-2
912			_aZDB-2-CMS
999			_c80826 _d80826