000			01501nam a22004455i 4500
001			978-3-540-74559-4
003			DE-He213
005			20130515021700.0
007			cr nn 008mamaa
008			100301s2009 gw | s |||| 0|eng d
020			_a9783540745594 _9978-3-540-74559-4
024	7		_a10.1007/978-3-540-74559-4 _2doi
050		4	_aT174.7
050		4	_aTA418.9.N35
072		7	_aTBN _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.115 _223
100	1		_aHuff, Howard R.
245	1	0	_aInto the Nano Era _h[electronic resource] : _bMoore’s Law Beyond Planar Silicon CMOS / _cedited by Howard R. Huff.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2009.
300			_bdigital.
490	0		_aSpringer Series in Materials Science, _x0933-033X ; _v106
650		0	_aChemistry.
650		0	_aCondensed matter.
650		0	_aElectronics.
650		0	_aOptical materials.
650		0	_aNanotechnology.
650	1	4	_aChemistry.
650	2	4	_aNanotechnology.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aCondensed Matter.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540745587
830		0	_aSpringer Series in Materials Science, _x0933-033X ; _v106
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-74559-4
912			_aZDB-2-CMS
999			_c79686 _d79686