000			01483nam a22004575i 4500
001			978-3-540-73607-3
003			DE-He213
005			20130515021646.0
007			cr nn 008mamaa
008			100301s2008 gw | s |||| 0|eng d
020			_a9783540736073 _9978-3-540-73607-3
024	7		_a10.1007/978-3-540-73607-3 _2doi
050		4	_aT174.7
050		4	_aTA418.9.N35
072		7	_aTBN _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.115 _223
100	1		_aWong, Basil T.
245	1	0	_aThermal Transport for Applications in Micro/Nanomachining _h[electronic resource] / _cby Basil T. Wong, M. Pinar Mengüç.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2008.
300			_bdigital.
490	0		_aMicrotechnology and MEMS, _x1615-8326
650		0	_aChemistry.
650		0	_aThermodynamics.
650		0	_aEngineering.
650		0	_aElectronics.
650		0	_aNanotechnology.
650	1	4	_aChemistry.
650	2	4	_aNanotechnology.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aEngineering, general.
650	2	4	_aThermodynamics.
700	1		_aMengüç, M. Pinar.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540736059
830		0	_aMicrotechnology and MEMS, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-73607-3
912			_aZDB-2-CMS
999			_c79451 _d79451