000 01421nam a22004455i 4500
001 978-3-540-26449-1
003 DE-He213
005 20130515021231.0
007 cr nn 008mamaa
008 100301s2005 gw | s |||| 0|eng d
020 _a9783540264491
_9978-3-540-26449-1
024 7 _a10.1007/b137604
_2doi
050 4 _aTK7800-8360
050 4 _aTK7874-7874.9
072 7 _aTJF
_2bicssc
072 7 _aTEC008000
_2bisacsh
082 0 4 _a621.381
_223
100 1 _aBreuer, Kenneth S.
245 1 0 _aMicroscale Diagnostic Techniques
_h[electronic resource] /
_cedited by Kenneth S. Breuer.
260 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2005.
300 _bdigital.
650 0 _aEngineering.
650 0 _aWeights and measures.
650 0 _aMechanics, applied.
650 0 _aElectronics.
650 0 _aNanotechnology.
650 1 4 _aEngineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aTheoretical and Applied Mechanics.
650 2 4 _aMeasurement Science, Instrumentation.
650 2 4 _aElectronic and Computer Engineering.
650 2 4 _aNanotechnology.
650 2 4 _aControl Engineering.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783540230991
856 4 0 _uhttp://dx.doi.org/10.1007/b137604
912 _aZDB-2-ENG
999 _c75302
_d75302