000 01402nam a22004215i 4500
001 978-1-4419-7121-0
003 DE-He213
005 20130515021046.0
007 cr nn 008mamaa
008 110516s2011 xxu| s |||| 0|eng d
020 _a9781441971210
_9978-1-4419-7121-0
024 7 _a10.1007/978-1-4419-7121-0
_2doi
050 4 _aTK7800-8360
050 4 _aTK7874-7874.9
072 7 _aTJF
_2bicssc
072 7 _aTEC008000
_2bisacsh
082 0 4 _a621.381
_223
100 1 _aWijesundara, Muthu B.J.
245 1 0 _aSilicon Carbide Microsystems for Harsh Environments
_h[electronic resource] /
_cby Muthu B.J. Wijesundara, Robert Azevedo.
260 _aNew York, NY :
_bSpringer New York,
_c2011.
300 _bdigital.
490 0 _aMEMS Reference Shelf,
_x1936-4407 ;
_v22
650 0 _aEngineering.
650 0 _aElectronics.
650 0 _aSystems engineering.
650 1 4 _aEngineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aCircuits and Systems.
650 2 4 _aNanotechnology and Microengineering.
700 1 _aAzevedo, Robert.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781441971203
830 0 _aMEMS Reference Shelf,
_x1936-4407 ;
_v22
856 4 0 _uhttp://dx.doi.org/10.1007/978-1-4419-7121-0
912 _aZDB-2-ENG
999 _c73277
_d73277