| 000 | 01319nam a22004095i 4500 | ||
|---|---|---|---|
| 001 | 978-0-387-69010-0 | ||
| 003 | DE-He213 | ||
| 005 | 20130515020527.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2009 xxu| s |||| 0|eng d | ||
| 020 |
_a9780387690100 _9978-0-387-69010-0 |
||
| 024 | 7 |
_a10.1007/978-0-387-69010-0 _2doi |
|
| 050 | 4 | _aTK7888.4 | |
| 072 | 7 |
_aTJFC _2bicssc |
|
| 072 | 7 |
_aTEC008010 _2bisacsh |
|
| 082 | 0 | 4 |
_a621.3815 _223 |
| 100 | 1 | _aEl-Kareh, Badih. | |
| 245 | 1 | 0 |
_aSilicon Devices and Process Integration _h[electronic resource] : _bDeep Submicron and Nano-Scale Technologies / _cby Badih El-Kareh. |
| 260 |
_aBoston, MA : _bSpringer US, _c2009. |
||
| 300 | _bdigital. | ||
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aComputer engineering. | |
| 650 | 0 | _aElectronics. | |
| 650 | 0 | _aSystems engineering. | |
| 650 | 0 | _aMaterials. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aCircuits and Systems. |
| 650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | _aElectrical Engineering. |
| 650 | 2 | 4 | _aMaterials Science, general. |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9780387367989 |
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-0-387-69010-0 |
| 912 | _aZDB-2-ENG | ||
| 999 |
_c67440 _d67440 |
||