| 000 | 02673cam a2200553Ki 4500 | ||
|---|---|---|---|
| 001 | 9780429266010 | ||
| 003 | FlBoTFG | ||
| 005 | 20220509193124.0 | ||
| 006 | m o d | ||
| 007 | cr cnu---unuuu | ||
| 008 | 190711s2020 flu ob 000 0 eng d | ||
| 040 |
_aOCoLC-P _beng _erda _epn _cOCoLC-P |
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| 020 |
_a9780429266010 _q(electronic bk.) |
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| 020 |
_a0429266014 _q(electronic bk.) |
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| 020 |
_a9780429556524 _q(electronic bk. : PDF) |
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| 020 |
_a0429556527 _q(electronic bk. : PDF) |
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| 020 |
_a9780429565465 _q(electronic bk. : Mobipocket) |
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| 020 |
_a0429565461 _q(electronic bk. : Mobipocket) |
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| 020 |
_a9780429560996 _q(electronic bk. : EPUB) |
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| 020 |
_a0429560990 _q(electronic bk. : EPUB) |
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| 020 | _z9780367217761 | ||
| 020 | _z0367217767 | ||
| 035 | _a(OCoLC)1107880829 | ||
| 035 | _a(OCoLC-P)1107880829 | ||
| 050 | 4 |
_aTK7872.D53 _bT63 2020eb |
|
| 072 | 7 |
_aTEC _x007000 _2bisacsh |
|
| 072 | 7 |
_aTEC _x008010 _2bisacsh |
|
| 072 | 7 |
_aTEC _x008070 _2bisacsh |
|
| 072 | 7 |
_aTJF _2bicssc |
|
| 082 | 0 | 4 |
_a621.3815 _223 |
| 100 | 1 |
_aToan, Nguyen Van, _eauthor. |
|
| 245 | 1 | 0 |
_aCapacitive silicon resonators : _bperformance enhancement methods / _cNguyen Van Toan and Takahito Ono. |
| 264 | 1 |
_aBoca Raton, FL : _bCRC Press/Taylor & Francis Group, _c[2020] |
|
| 300 | _a1 online resource. | ||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 520 |
_a"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- _cProvided by publisher. |
||
| 588 | _aOCLC-licensed vendor bibliographic record. | ||
| 650 | 0 | _aDielectric resonators. | |
| 650 | 0 | _aElectric resonators. | |
| 650 | 0 | _aNanoelectromechanical systems. | |
| 650 | 0 | _aSemiconductors. | |
| 650 | 7 |
_aTECHNOLOGY / Electricity _2bisacsh |
|
| 650 | 7 |
_aTECHNOLOGY / Electronics / Circuits / General _2bisacsh |
|
| 650 | 7 |
_aTECHNOLOGY / Electronics / Microelectronics _2bisacsh |
|
| 700 | 1 |
_aOno, Takahito, _eauthor. |
|
| 856 | 4 | 0 |
_3Taylor & Francis _uhttps://www.taylorfrancis.com/books/9780429266010 |
| 856 | 4 | 2 |
_3OCLC metadata license agreement _uhttp://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf |
| 999 |
_c130334 _d130334 |
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