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003 DE-He213
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007 cr nn 008mamaa
008 100316s2010 ne | s |||| 0|eng d
020 _a9789048138074
_9978-90-481-3807-4
024 7 _a10.1007/978-90-481-3807-4
_2doi
050 4 _aTP248.13-248.65
072 7 _aTDCB
_2bicssc
072 7 _aSCI010000
_2bisacsh
082 0 4 _a660.6
_223
100 1 _aGusev, Evgeni.
_eeditor.
245 1 0 _aAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
_h[electronic resource] /
_cedited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
246 3 _aProceedings of the NATO Advanced Research Worskhop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators St. Petersburg, Russia 29 June - 2 July 2008
264 1 _aDordrecht :
_bSpringer Netherlands,
_c2010.
300 _aIX, 313p.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aNATO Science for Peace and Security Series B: Physics and Biophysics,
_x1874-6500
505 0 _aMEMS/NEMS Technologies and Applications -- History of Early Research on MEMS in Russia (U.S.S.R.) -- Challenges of Complete CMOS/MEMS Systems Integration -- MEMS for Practical Applications -- Nanochip: A MEMS-Based Ultra-High Data Density Memory Device -- Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU -- Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors -- Monocrystalline-Silicon Microwave MEMS Devices -- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites -- MEMS Device and Reliability Physics -- Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams -- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS -- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches -- Advanced Processes and Materials -- Development of DRIE for the Next Generation of MEMS Devices -- Low-Temperature Processes for MEMS Device Fabrication -- High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications -- 3D Integration of MEMS and IC: Design, Technology and Simulations -- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices -- Modeling of Dry Etching in Production of MEMS -- XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures -- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys -- Sensors -- Smart Sensors: Advantages and Pitfalls -- Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents -- Integration of Diverse Biological Materials in Micro/Nano Devices -- Force Sensing Optimization and Applications -- Using Parametric Resonance to Improve Micro Gyrsocope Robustness.
520 _aThe main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies.
650 0 _aChemistry.
650 0 _aMicroreactors.
650 0 _aMechanics.
650 0 _aMechanical engineering.
650 0 _aEngineering.
650 0 _aMicrowaves.
650 1 4 _aChemistry.
650 2 4 _aMicroengineering.
650 2 4 _aNanotechnology and Microengineering.
650 2 4 _aMechanics.
650 2 4 _aMechanical Engineering.
650 2 4 _aMicrowaves, RF and Optical Engineering.
700 1 _aGarfunkel, Eric.
_eeditor.
700 1 _aDideikin, Arthur.
_eeditor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9789048138050
830 0 _aNATO Science for Peace and Security Series B: Physics and Biophysics,
_x1874-6500
856 4 0 _uhttp://dx.doi.org/10.1007/978-90-481-3807-4
912 _aZDB-2-PHA
999 _c113448
_d113448