000			03181nam a22005535i 4500
001			978-0-387-09511-0
003			DE-He213
005			20140220084454.0
007			cr nn 008mamaa
008			100301s2010 xxu| s |||| 0|eng d
020			_a9780387095110 _9978-0-387-09511-0
024	7		_a10.1007/978-0-387-09511-0 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
072		7	_aTEC008070 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aAdams, Thomas M. _eauthor.
245	1	0	_aIntroductory MEMS _h[electronic resource] : _bFabrication and Applications / _cby Thomas M. Adams, Richard A. Layton.
250			_a1.
264		1	_aBoston, MA : _bSpringer US, _c2010.
300			_aXV, 444p. 50 illus., 25 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_aFabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories.
520			_aIntroductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
650		0	_aEngineering.
650		0	_aMechanics.
650		0	_aMaterials.
650		0	_aElectronics.
650		0	_aSystems engineering.
650		0	_aSurfaces (Physics).
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aCircuits and Systems.
650	2	4	_aMechanics.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aContinuum Mechanics and Mechanics of Materials.
700	1		_aLayton, Richard A. _eauthor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387095103
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-09511-0
912			_aZDB-2-ENG
999			_c109740 _d109740