| 000 | 02600nam a22005055i 4500 | ||
|---|---|---|---|
| 001 | 978-3-642-12903-2 | ||
| 003 | DE-He213 | ||
| 005 | 20140220083744.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110304s2011 gw | s |||| 0|eng d | ||
| 020 |
_a9783642129032 _9978-3-642-12903-2 |
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| 024 | 7 |
_a10.1007/978-3-642-12903-2 _2doi |
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| 050 | 4 | _aT174.7 | |
| 072 | 7 |
_aTDPB _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 082 | 0 | 4 |
_a620.5 _223 |
| 100 | 1 |
_aBüttgenbach, Stephanus. _eeditor. |
|
| 245 | 1 | 0 |
_aDesign and Manufacturing of Active Microsystems _h[electronic resource] / _cedited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. |
| 264 | 1 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011. |
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| 300 |
_aXII, 444 p. _bonline resource. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
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| 490 | 1 |
_aMicrotechnology and MEMS, _x1615-8326 |
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| 505 | 0 | _a1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications. | |
| 520 | _aThis book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems. | ||
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aStructural control (Engineering). | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 650 | 2 | 4 | _aMechatronics. |
| 650 | 2 | 4 | _aOperating Procedures, Materials Treatment. |
| 650 | 2 | 4 | _aNanotechnology. |
| 700 | 1 |
_aBurisch, Arne. _eeditor. |
|
| 700 | 1 |
_aHesselbach, Jürgen. _eeditor. |
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| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783642129025 |
| 830 | 0 |
_aMicrotechnology and MEMS, _x1615-8326 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-3-642-12903-2 |
| 912 | _aZDB-2-CMS | ||
| 999 |
_c106878 _d106878 |
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