Rare-Earth Implanted MOS Devices for Silicon Photonics [electronic resource] : Microstructural, Electrical and Optoelectronic Properties / by Lars Rebohle, Wolfgang Skorupa.
By: Rebohle, Lars.
Contributor(s): Skorupa, Wolfgang | SpringerLink (Online service).
Material type:![materialTypeLabel](/opac-tmpl/lib/famfamfam/BK.png)
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