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Rare-Earth Implanted MOS Devices for Silicon Photonics [electronic resource] : Microstructural, Electrical and Optoelectronic Properties / by Lars Rebohle, Wolfgang Skorupa.

By: Rebohle, Lars.
Contributor(s): Skorupa, Wolfgang | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Springer Series in Materials Science, 142.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010Description: digital.ISBN: 9783642144479.Subject(s): Optical materials | Materials Science | Optical and Electronic MaterialsDDC classification: 620.11295 | 620.11297 Online resources: Click here to access online In: Springer eBooks
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