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Laser Precision Microfabrication [electronic resource] / edited by Koji Sugioka, Michel Meunier, Alberto Piqué.

By: Sugioka, Koji.
Contributor(s): Meunier, Michel | Piqué, Alberto | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Springer Series in Materials Science, 135.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010Description: digital.ISBN: 9783642105234.Subject(s): Physics | Nanotechnology | Physics | Laser Technology, Photonics | NanotechnologyDDC classification: 621.36 Online resources: Click here to access online In: Springer eBooks
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