CMOS Hotplate Chemical Microsensors [electronic resource] / by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann.
By: Graf, Markus.
Contributor(s): Barrettino, Diego | Baltes, Henry P | Hierlemann, Andreas | SpringerLink (Online service).
Material type:
BookSeries: Microtechnology and MEMS.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007Description: digital.ISBN: 9783540695622.Subject(s): Engineering | Chemistry, Physical organic | Optical materials | Engineering | Physics and Applied Physics in Engineering | Physical Chemistry | Optical and Electronic MaterialsOnline resources: Click here to access online
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