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Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.

By: Büttgenbach, Stephanus [editor.].
Contributor(s): Burisch, Arne [editor.] | Hesselbach, Jürgen [editor.] | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Microtechnology and MEMS: Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011Description: XII, 444 p. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9783642129032.Subject(s): Engineering | Structural control (Engineering) | Nanotechnology | Engineering | Nanotechnology and Microengineering | Mechatronics | Operating Procedures, Materials Treatment | NanotechnologyDDC classification: 620.5 Online resources: Click here to access online
Contents:
1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.
In: Springer eBooksSummary: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
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1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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