Normal view
MARC view
International Conference on the Science and Technology of Defect Control in Semiconductors (1989 : Yokohama-shi, Japan) (Meeting Name)
Machine generated authority record.
Work cat.: (KEPU)28991: International Conference on the Science and Technology of Defect Control in Semiconductors (1989 : Yokohama-shi, Japan), Defect control in semiconductors :, 1990.