Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators (Record no. 113448)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04866nam a22005655i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-90-481-3807-4 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20140220084600.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 100316s2010 ne | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9789048138074 |
| -- | 978-90-481-3807-4 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1007/978-90-481-3807-4 |
| Source of number or code | doi |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TP248.13-248.65 |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | TDCB |
| Source | bicssc |
| 072 #7 - SUBJECT CATEGORY CODE | |
| Subject category code | SCI010000 |
| Source | bisacsh |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 660.6 |
| Edition number | 23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Gusev, Evgeni. |
| Relator term | editor. |
| 245 10 - TITLE STATEMENT | |
| Title | Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators |
| Medium | [electronic resource] / |
| Statement of responsibility, etc | edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. |
| 246 3# - VARYING FORM OF TITLE | |
| Title proper/short title | Proceedings of the NATO Advanced Research Worskhop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators St. Petersburg, Russia 29 June - 2 July 2008 |
| 264 #1 - | |
| -- | Dordrecht : |
| -- | Springer Netherlands, |
| -- | 2010. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | IX, 313p. |
| Other physical details | online resource. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 490 1# - SERIES STATEMENT | |
| Series statement | NATO Science for Peace and Security Series B: Physics and Biophysics, |
| International Standard Serial Number | 1874-6500 |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | MEMS/NEMS Technologies and Applications -- History of Early Research on MEMS in Russia (U.S.S.R.) -- Challenges of Complete CMOS/MEMS Systems Integration -- MEMS for Practical Applications -- Nanochip: A MEMS-Based Ultra-High Data Density Memory Device -- Low Cost Silicon Coriolis’ Gyroscope Paves the Way to Consumer IMU -- Microwave and Millimetre Wave Devices Based on Micromachining of III-V Semiconductors -- Monocrystalline-Silicon Microwave MEMS Devices -- Three-Dimensional Photonic Crystals Based on Opal-Semiconductor and Opal-Metal Nanocomposites -- MEMS Device and Reliability Physics -- Pull-in Dynamics of Electrostatically Actuated Bistable Micro Beams -- Path Following and Numerical Continuation Methods for Non-Linear MEMS and NEMS -- The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches -- Advanced Processes and Materials -- Development of DRIE for the Next Generation of MEMS Devices -- Low-Temperature Processes for MEMS Device Fabrication -- High-Temperature Stable Au–Sn and Cu–Sn Interconnects for 3D Stacked Applications -- 3D Integration of MEMS and IC: Design, Technology and Simulations -- Low-Frequency Electronic Noise in the Back-Gated and Top-Gated Graphene Devices -- Modeling of Dry Etching in Production of MEMS -- XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures -- Internal Stresses in Martensite Formation in Copper Based Shape Memory Alloys -- Sensors -- Smart Sensors: Advantages and Pitfalls -- Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents -- Integration of Diverse Biological Materials in Micro/Nano Devices -- Force Sensing Optimization and Applications -- Using Parametric Resonance to Improve Micro Gyrsocope Robustness. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array of backgrounds such as device physics, technologists, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keep up with leading edge research, and newcomers to the field who wish to learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Chemistry. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microreactors. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Mechanics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Mechanical engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microwaves. |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Chemistry. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microengineering. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Nanotechnology and Microengineering. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Mechanics. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Mechanical Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microwaves, RF and Optical Engineering. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Garfunkel, Eric. |
| Relator term | editor. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Dideikin, Arthur. |
| Relator term | editor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY | |
| Title | Springer eBooks |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Display text | Printed edition: |
| International Standard Book Number | 9789048138050 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | NATO Science for Peace and Security Series B: Physics and Biophysics, |
| -- | 1874-6500 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://dx.doi.org/10.1007/978-90-481-3807-4 |
| 912 ## - | |
| -- | ZDB-2-PHA |
No items available.