Silicon Carbide Microsystems for Harsh Environments (Record no. 105694)
000 -LEADER | |
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fixed length control field | 03622nam a22005055i 4500 |
001 - CONTROL NUMBER | |
control field | 978-1-4419-7121-0 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | DE-He213 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20140220083722.0 |
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
fixed length control field | cr nn 008mamaa |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 110516s2011 xxu| s |||| 0|eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9781441971210 |
-- | 978-1-4419-7121-0 |
024 7# - OTHER STANDARD IDENTIFIER | |
Standard number or code | 10.1007/978-1-4419-7121-0 |
Source of number or code | doi |
050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
Classification number | TK7800-8360 |
050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
Classification number | TK7874-7874.9 |
072 #7 - SUBJECT CATEGORY CODE | |
Subject category code | TJF |
Source | bicssc |
072 #7 - SUBJECT CATEGORY CODE | |
Subject category code | TEC008000 |
Source | bisacsh |
072 #7 - SUBJECT CATEGORY CODE | |
Subject category code | TEC008070 |
Source | bisacsh |
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.381 |
Edition number | 23 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | Wijesundara, Muthu B.J. |
Relator term | author. |
245 10 - TITLE STATEMENT | |
Title | Silicon Carbide Microsystems for Harsh Environments |
Medium | [electronic resource] / |
Statement of responsibility, etc | by Muthu B.J. Wijesundara, Robert Azevedo. |
264 #1 - | |
-- | New York, NY : |
-- | Springer New York, |
-- | 2011. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | XVI, 232 p. |
Other physical details | online resource. |
336 ## - | |
-- | text |
-- | txt |
-- | rdacontent |
337 ## - | |
-- | computer |
-- | c |
-- | rdamedia |
338 ## - | |
-- | online resource |
-- | cr |
-- | rdacarrier |
347 ## - | |
-- | text file |
-- | |
-- | rda |
490 1# - SERIES STATEMENT | |
Series statement | MEMS Reference Shelf, |
International Standard Serial Number | 1936-4407 ; |
Volume number/sequential designation | 22 |
505 0# - FORMATTED CONTENTS NOTE | |
Formatted contents note | Introduction to Harsh MEMs -- Silicon Carbide Processing -- Silicon Carbide Electronics -- Silicon Carbide MEMS Devices -- Silicon Carbide MEMs Device Packaging -- System Integration. |
520 ## - SUMMARY, ETC. | |
Summary, etc | Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation are discussed at length. The authors use the SiC technology platform suite as the model platform for developing harsh environment Microsystems, and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. This book also:
Silicon Carbide Microsystems for Harsh Environments not only reviews the state-of-the-art MEMS devices, but also provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Engineering. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Electronics. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Systems engineering. |
650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Engineering. |
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Electronics and Microelectronics, Instrumentation. |
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Circuits and Systems. |
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Nanotechnology and Microengineering. |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Azevedo, Robert. |
Relator term | author. |
710 2# - ADDED ENTRY--CORPORATE NAME | |
Corporate name or jurisdiction name as entry element | SpringerLink (Online service) |
773 0# - HOST ITEM ENTRY | |
Title | Springer eBooks |
776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
Display text | Printed edition: |
International Standard Book Number | 9781441971203 |
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
Uniform title | MEMS Reference Shelf, |
-- | 1936-4407 ; |
Volume number/sequential designation | 22 |
856 40 - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | http://dx.doi.org/10.1007/978-1-4419-7121-0 |
912 ## - | |
-- | ZDB-2-ENG |
No items available.