Deulin, E. A.

Mechanics and Physics of Precise Vacuum Mechanisms [electronic resource] / by E. A. Deulin, V. P. Mikhailov, Yu V. Panfilov, R. A. Nevshupa. - Dordrecht : Springer Netherlands, 2010. - digital. - Fluid Mechanics and Its Applications, 91 0926-5112 ; . - Fluid Mechanics and Its Applications, 91 .

9789048125203

10.1007/978-90-481-2520-3 doi


Engineering.
Vibration.
Engineering design.
Chemistry, inorganic.
Surfaces (Physics).
Engineering.
Engineering Design.
Engineering, general.
Tribology, Corrosion and Coatings.
Surfaces and Interfaces, Thin Films.
Vibration, Dynamical Systems, Control.

TA174

620.0042

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