Schomburg, Werner Karl.
Introduction to Microsystem Design [electronic resource] / by Werner Karl Schomburg. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2011. - digital. - RWTHedition, 1 1865-0899 ; . - RWTHedition, 1 .
9783642194894
10.1007/978-3-642-19489-4 doi
Engineering.
Systems engineering.
Optical materials.
Engineering.
Nanotechnology and Microengineering.
Optical and Electronic Materials.
Applied and Technical Physics.
Circuits and Systems.
T174.7
620.5
Introduction to Microsystem Design [electronic resource] / by Werner Karl Schomburg. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2011. - digital. - RWTHedition, 1 1865-0899 ; . - RWTHedition, 1 .
9783642194894
10.1007/978-3-642-19489-4 doi
Engineering.
Systems engineering.
Optical materials.
Engineering.
Nanotechnology and Microengineering.
Optical and Electronic Materials.
Applied and Technical Physics.
Circuits and Systems.
T174.7
620.5