Solgaard, Olav.

Photonic Microsystems Micro and Nanotechnology Applied to Optical Devices and Systems / [electronic resource] : by Olav Solgaard. - Boston, MA : Springer US, 2009. - digital. - MEMS Reference Shelf, 1936-4407 . - MEMS Reference Shelf, .

9780387683515

10.1007/978-0-387-68351-5 doi


Engineering.
Physical optics.
Systems engineering.
Engineering.
Nanotechnology and Microengineering.
Applied Optics, Optoelectronics, Optical Devices.
Circuits and Systems.

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